JPH021252B2 - - Google Patents
Info
- Publication number
- JPH021252B2 JPH021252B2 JP17975281A JP17975281A JPH021252B2 JP H021252 B2 JPH021252 B2 JP H021252B2 JP 17975281 A JP17975281 A JP 17975281A JP 17975281 A JP17975281 A JP 17975281A JP H021252 B2 JPH021252 B2 JP H021252B2
- Authority
- JP
- Japan
- Prior art keywords
- strain
- pressure
- generating part
- thin
- gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 230000035945 sensitivity Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 239000012530 fluid Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17975281A JPS5882138A (ja) | 1981-11-11 | 1981-11-11 | 半導体測定ダイアフラム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17975281A JPS5882138A (ja) | 1981-11-11 | 1981-11-11 | 半導体測定ダイアフラム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5882138A JPS5882138A (ja) | 1983-05-17 |
| JPH021252B2 true JPH021252B2 (en]) | 1990-01-10 |
Family
ID=16071250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17975281A Granted JPS5882138A (ja) | 1981-11-11 | 1981-11-11 | 半導体測定ダイアフラム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5882138A (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0770738B2 (ja) * | 1984-12-27 | 1995-07-31 | 日本電気株式会社 | 圧力センサ |
| JPH0770737B2 (ja) * | 1984-12-27 | 1995-07-31 | 日本電気株式会社 | 圧力センサ |
-
1981
- 1981-11-11 JP JP17975281A patent/JPS5882138A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5882138A (ja) | 1983-05-17 |
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